Diamond and Amorphous Carbon MEMS

J. P. Sullivan; T. A. Friedmann; Klas Hjort

doi:10.1557/mrs2001.68

Keywords

Microelectromechanical systemsMaterials scienceDiamondDiamond-like carbonNanotechnologyCarbon fibersAmorphous solidAmorphous carbonMechanical engineeringComposite materialEngineeringComposite numberThin filmChemistry

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Publication Info

Year: 2001
Type: article
Volume: 26
Issue: 4
Pages: 309-311
Citations: 101
Access: Closed

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APA Style

                            
                                    J. P. Sullivan, 
                                
                                    T. A. Friedmann, 
                                
                                    Klas Hjort
                                
                            (2001). 
                            Diamond and Amorphous Carbon MEMS. 
                            MRS Bulletin
                            , 26
                            (4)
                            , 309-311.
                            https://doi.org/10.1557/mrs2001.68

Identifiers

DOI: 10.1557/mrs2001.68