Abstract

Procedures have been developed based on finite-element modeling of nanoindentation data to obtain the mechanical properties of thin films and ion-beam-modified layers independently of the properties of the underlying substrates. These procedures accurately deduce the yield strength, Young’s elastic modulus, and layer hardness from indentations as deep as 50% of the layer thickness or more. We have used these procedures to evaluate materials ranging from ion implanted metals to deposited, diamond-like carbon layers. The technique increases the applicability of indentation testing to very thin layers, composite layers, and modulated compositions. This article presents an overview of the procedures involved and illustrates them with selected examples.

Keywords

NanoindentationMaterials scienceIndentationFinite element methodDiamondLayer (electronics)Composite materialThin layersModulusThin filmYield (engineering)Composite numberCarbon fibersElastic modulusFocused ion beamYoung's modulusStructural engineeringNanotechnologyIonChemistry

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Publication Info

Year
1999
Type
article
Volume
85
Issue
3
Pages
1460-1474
Citations
249
Access
Closed

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Cite This

J. A. Knapp, D. M. Follstaedt, S. M. Myers et al. (1999). Finite-element modeling of nanoindentation. Journal of Applied Physics , 85 (3) , 1460-1474. https://doi.org/10.1063/1.369178

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DOI
10.1063/1.369178