Keywords
NanoindentationIndentationMaterials scienceMicroelectronicsThin filmNanometreSubstrate (aquarium)Composite materialModulusElastic modulusNanotechnology
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Publication Info
- Year
- 1992
- Type
- article
- Volume
- 17
- Issue
- 7
- Pages
- 28-33
- Citations
- 965
- Access
- Closed
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Cite This
George M. Pharr,
W. C. Oliver
(1992).
Measurement of Thin Film Mechanical Properties Using Nanoindentation.
MRS Bulletin
, 17
(7)
, 28-33.
https://doi.org/10.1557/s0883769400041634
Identifiers
- DOI
- 10.1557/s0883769400041634