Analysis of amorphous carbon thin films by spectroscopic ellipsometry

Joungchel Lee; R. W. Collins; V.S. Veerasamy; John Robertson

doi:10.1016/s0022-3093(98)00142-2

Keywords

Amorphous solidAmorphous carbonMaterials scienceAnalytical Chemistry (journal)Carbon fibersElectron energy loss spectroscopyEllipsometryRange (aeronautics)Thin filmSpectroscopyIsotropyIonDielectricComposite numberOpticsChemistryTransmission electron microscopyCrystallographyOptoelectronicsNanotechnologyComposite materialPhysics

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Publication Info

Year: 1998
Type: article
Volume: 227-230
Pages: 617-621
Citations: 18
Access: Closed

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APA Style

                            
                                    Joungchel Lee, 
                                
                                    R. W. Collins, 
                                
                                    V.S. Veerasamy
                                
                                et al.
                            
                            (1998). 
                            Analysis of amorphous carbon thin films by spectroscopic ellipsometry. 
                            Journal of Non-Crystalline Solids
                            , 227-230
                            
                            , 617-621.
                            https://doi.org/10.1016/s0022-3093(98)00142-2

Identifiers

DOI: 10.1016/s0022-3093(98)00142-2