A planar air levitated electrostatic actuator system
The design and testing of a micromotor capable of moving multiple objects in three dimensions is discussed. The fixed surface of the motor, fabricated on a silicon wafer, contai...
Publications
1 shownFrequent Co-Authors
Researcher Info
- h-index
- 1
- Publications
- 1
- Citations
- 131
- Institution
- University of California, Berkeley
External Links
Identifiers
- ORCID
- 0000-0001-6242-5379
Impact Metrics
h-index
1
h-index: Number of publications with at least h citations each.