Microstructure to substrate self-assembly using capillary forces
We have demonstrated the fluidic self-assembly of micromachined silicon parts onto silicon and quartz substrates in a preconfigured pattern with submicrometer positioning precis...
Publications
2 shownA planar air levitated electrostatic actuator system
The design and testing of a micromotor capable of moving multiple objects in three dimensions is discussed. The fixed surface of the motor, fabricated on a silicon wafer, contai...
Frequent Co-Authors
Researcher Info
- h-index
- 2
- Publications
- 2
- Citations
- 545
- Institution
- University of California, Berkeley
External Links
Identifiers
- ORCID
- 0000-0002-4554-7347
Impact Metrics
h-index
2
h-index: Number of publications with at least h citations each.