Keywords
PhotoluminescenceAdsorptionOxygenSiliconChemistryThermal oxidationAnalytical Chemistry (journal)Isotropic etchingTemperature cyclingIntensity (physics)ThermalMaterials scienceChemical engineeringPhotochemistryChemical physicsEtching (microfabrication)Physical chemistryOpticsOptoelectronicsEnvironmental chemistryThermodynamicsOrganic chemistry
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Publication Info
- Year
- 1986
- Type
- article
- Volume
- 47
- Issue
- 4
- Pages
- 363-373
- Citations
- 15
- Access
- Closed
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Cite This
Leigh Canham
(1986).
Room temperature photoluminescence from etched silicon surfaces: The effects of chemical pretreatments and gaseous ambients.
Journal of Physics and Chemistry of Solids
, 47
(4)
, 363-373.
https://doi.org/10.1016/0022-3697(86)90026-0
Identifiers
- DOI
- 10.1016/0022-3697(86)90026-0