Keywords

Scanning tunneling microscopeVoid (composites)EnergeticsDensity functional theorySiliconOxideMaterials scienceScanning electron microscopeCrystallographyActivation energyChemistryChemical physicsNanotechnologyPhysical chemistryThermodynamicsComputational chemistryComposite materialMetallurgy

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Publication Info

Year
1997
Type
article
Volume
387
Issue
1-3
Pages
L1057-L1061
Citations
4
Access
Closed

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Cite This

Shaoping Tang, Yi Wei, Robert M. Wallace (1997). Energetics of void enlargement in thermally grown ultrathin Si-oxide on Si(001). Surface Science , 387 (1-3) , L1057-L1061. https://doi.org/10.1016/s0039-6028(97)00469-x

Identifiers

DOI
10.1016/s0039-6028(97)00469-x

Data Quality

Data completeness: 68%