Keywords

SputteringTungsten disulfideMaterials scienceThin filmSputter depositionSubstrate (aquarium)Analytical Chemistry (journal)Pulsed DCGraphitePyrolytic carbonScanning electron microscopePartial pressureTungstenChemical engineeringChemistryComposite materialNanotechnologyMetallurgy

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Publication Info

Year
1997
Type
article
Volume
182
Issue
3-4
Pages
389-393
Citations
41
Access
Closed

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41
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K. Ellmer, Carsten Stock, K. Diesner et al. (1997). Deposition of c⊥-oriented tungsten disulfide (WS2) films by reactive DC magnetron sputtering from a W-target in Ar/H2S. Journal of Crystal Growth , 182 (3-4) , 389-393. https://doi.org/10.1016/s0022-0248(97)00355-2

Identifiers

DOI
10.1016/s0022-0248(97)00355-2