Abstract

In this letter, a top-gated field effect device (FED) manufactured from\nmonolayer graphene is investigated. Except for graphene deposition, a\nconventional top-down CMOS-compatible process flow is applied. Carrier\nmobilities in graphene pseudo-MOS structures are compared to those obtained\nfrom top-gated Graphene-FEDs. The extracted values exceed the universal\nmobility of silicon and silicon-on-insulator MOSFETs.\n

Keywords

GrapheneMaterials scienceSiliconOptoelectronicsGraphene nanoribbonsElectron mobilityMonolayerSilicon on insulatorMOSFETField-effect transistorNanotechnologyCMOSVoltageTransistorElectrical engineering

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Year
2007
Type
article
Volume
28
Issue
4
Pages
282-284
Citations
1051
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Max C. Lemme, T. J. Echtermeyer, M. Baus et al. (2007). A Graphene Field-Effect Device. IEEE Electron Device Letters , 28 (4) , 282-284. https://doi.org/10.1109/led.2007.891668

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DOI
10.1109/led.2007.891668