Publications
2 shownPhase-Modulated Ellipsometry Based on Hybrid Algorithm for Non-Calibration Film Thickness Measurement
A phase-modulated ellipsometer enables non-contact, high-precision determination of thin-film optical parameters and thickness through polarized light modulation analysis. Howev...
Frequent Co-Authors
Researcher Info
- h-index
- 1
- Publications
- 2
- Citations
- 1,485
- Institution
- Wuhan University
External Links
Identifiers
- ORCID
- 0000-0001-5635-8499
Impact Metrics
h-index
1
h-index: Number of publications with at least h citations each.