Publications
2 shownInfluence of Dressing Methods on Chipping Size During Si and SiC Die Singulation: A Review
The review is intended to systematize the latest achievements and the most promising methods in polycrystalline diamond saw blade dressing used for dicing Si and SiC wafers. Dic...
Frequent Co-Authors
Researcher Info
- h-index
- 1
- Publications
- 2
- Citations
- 184
- Institution
- Lomonosov Moscow State University
External Links
Identifiers
- ORCID
- 0000-0002-3897-8587
Impact Metrics
h-index
1
h-index: Number of publications with at least h citations each.