Abstract

The synthesis of massive arrays of monodispersed carbon nanotubes that are self-oriented on patterned porous silicon and plain silicon substrates is reported. The approach involves chemical vapor deposition, catalytic particle size control by substrate design, nanotube positioning by patterning, and nanotube self-assembly for orientation. The mechanisms of nanotube growth and self-orientation are elucidated. The well-ordered nanotubes can be used as electron field emission arrays. Scaling up of the synthesis process should be entirely compatible with the existing semiconductor processes, and should allow the development of nanotube devices integrated into silicon technology.

Keywords

Carbon nanotubeNanotubeMaterials scienceSiliconNanotechnologyChemical vapor depositionSubstrate (aquarium)Field electron emissionCarbon nanotube quantum dotOptical properties of carbon nanotubesSemiconductorCarbon nanotube supported catalystCarbon nanotube field-effect transistorPorous siliconOptoelectronicsElectronCarbon nanofiberField-effect transistor

Affiliated Institutions

Related Publications

Publication Info

Year
1999
Type
article
Volume
283
Issue
5401
Pages
512-514
Citations
2989
Access
Closed

External Links

View on DOI.org

Social Impact

Altmetric
PlumX Metrics

Social media, news, blog, policy document mentions

Citation Metrics

2989
OpenAlex

Cite This

Shoushan Fan, Michael G. Chapline, Nathan R. Franklin et al. (1999). Self-Oriented Regular Arrays of Carbon Nanotubes and Their Field Emission Properties. Science , 283 (5401) , 512-514. https://doi.org/10.1126/science.283.5401.512

Identifiers

DOI
10.1126/science.283.5401.512