Integrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers

Yuhei Hayamizu; Takeo Yamada; Kohei Mizuno; Robert C. Davis; Don N. Futaba; Motoo Yumura; Kenji Hata

doi:10.1038/nnano.2008.98

Keywords

NanodeviceCarbon nanotubeMaterials scienceNanotechnologyWaferFabricationMicroelectromechanical systemsCantileverScalabilityNanotubeComputer scienceComposite material

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Publication Info

Year: 2008
Type: article
Volume: 3
Issue: 5
Pages: 289-294
Citations: 283
Access: Closed

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APA Style

                            
                                
                                    Yuhei Hayamizu, 
                                
                                    Takeo Yamada, 
                                
                                    Kohei Mizuno
                                
                                et al.
                            
                            (2008). 
                            Integrated three-dimensional microelectromechanical devices from processable carbon nanotube wafers. 
                            Nature Nanotechnology
                            , 3
                            (5)
                            , 289-294.
                            https://doi.org/10.1038/nnano.2008.98
                        

Identifiers

DOI: 10.1038/nnano.2008.98