Keywords
Polysilicon depletion effectCMOSMaterials scienceThin-film transistorOptoelectronicsTransistorElectrical engineeringEngineeringNanotechnologyLayer (electronics)Gate oxideVoltage
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Publication Info
- Year
- 1992
- Type
- article
- Citations
- 3
- Access
- Closed
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Kristofer Stefan Josef Pister
(1992).
Hinged Polysilicon Structures with Integrated CMOS Thin Film Transistors.
.