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Junyoung Lee,
Jung-Pyo Hong,
Seungmo Kim
(2025).
Flow-field-driven control of coating uniformity in fowlp soft-bake chambers.
Journal of Mechanical Science and Technology
.
https://doi.org/10.1007/s12206-025-2512-3
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- DOI
- 10.1007/s12206-025-2512-3