Atom Migration and Chemical Action in Chemical Mechanical Polishing CVD Diamond: a Molecular Dynamics Approach
Jianhui Zhu
,
Hang Gao
,
Zewei Yuan
,
Jianhui Zhu
,
Hang Gao
,
Zewei Yuan
,
Yuchun Xu
,
Ningchang Wang
,
Zixiong Sun
2025
International Journal of Precision Engineering and Manufacturing
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