Keywords
Materials scienceSiliconAnnealing (glass)ImpurityDopantIon implantationFabricationTinDiodeAtmospheric temperature rangeRedistribution (election)OptoelectronicsMetallurgyDopingIonChemistry
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Publication Info
- Year
- 1989
- Type
- article
- Volume
- 4
- Issue
- 1-4
- Pages
- 95-99
- Citations
- 23
- Access
- Closed
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Cite This
Leigh Canham,
M.R. Dyball,
K.G. Barraclough
(1989).
A study of carbon-implanted silicon for light-emitting diode fabrication.
Materials Science and Engineering B
, 4
(1-4)
, 95-99.
https://doi.org/10.1016/0921-5107(89)90223-7
Identifiers
- DOI
- 10.1016/0921-5107(89)90223-7